Analog MFCs

 Sic Analog Mass Flow Controller provides:

    Metal seal.

    Low cost of owner.

    Environment temperature compensation.

    Wide flow range available (10CC-200SLM).

    3-points linearty calibration.

   The mass flow controller, MC-4400/1200, is developed under the theorem of thermal mass flow detection. The controller is a high-efficiency NC gas flow controller consisting of a new flow sensor and a new solenoid valve. Followings are the features of MC-4400/1200:

    NC valve design.

    The special designed bypass can achieve the goal to control large flow with a small body. The design of MC-4400 can expand the flow from 10sccm to 5L. And MC-1200 can expand the flow form 20L to 100L.

    The value of CF of the sensor is set by a Dip-switch to match with any kind of gas.

    Because the temperature of the sensor is quite low(the temperature is about 300C higher then ambient temperature), the quality of the gas intended to be measured will not be changed. Meanwhile, the controller has an advantage for long term safety.

    Maintain a constant difference between the sensor temperature and the ambient temperature, so the controller will not be affected by the ambient temperature. Operating temperature can be achieved.

    Clean (clean structure).

    Except for 0-5VDC, 0-5mA can also be used to input the setting of flow. Switching the DIP switch can select the input method. Besides, because a differential input is available, there is no variation error at common earth.

    The response speed is a two-step design including FAST and SLOW. The speed is switched by a DIP switch.

    Three control modes are available for the control under 2%.

    The filter element with metallic enclosure can avoid high frequency noise.

    The signal connector is a D05 type 8pin female connector.

 

Specifications

Name

Mass Flow Controller

Mode

MC-4400  (Normally closed)

MC-1200/1250  (Normally closed)

Standard flow Range (Full Scale)

10,20,50,100,200,500sccm (1,2,5SLM)

20,30,50,100SLM

Minimum control flow

2% F.S.

Accuracy degree

±1.0%F.S.

±2%F.S.

Linear

±1%F.S.

Response time sec (2~98%F.S)

1

Required pressure difference

0.5~3.0kg/cm2

0.5~3

1~3

2~3

Withstand pressure

980kpa(10kgf/cm2)

Temperature coefficient

0.05%CF F.S./0C(For Zero)

0.05%CF F.S./0C(For Zero)

Temperature coefficient

0.05%CF F.S./0C(ForSpan)

0.1%CF F.S./0C(For Span)

Operation guaranty temperature

00C~500C

Leakage test

1 x 10-10 atm-cc/sec

1 x 10-8 atm-cc/sec

The material contact gas

SUS-316L

The material of seal

Gold (Au)

Viton

Fittings

1/4 ,3/8”(VCR, SWL) *VCO(Option)

Zero

Zero VR

Power

+15V DC 60mA, -15V DC 200mA

Flow output signal

Flow proportion 0-5V(DC), 0~5mA or 0~20mA

Flow setting signal

Flow proportion 0-5V(DC) , 0~5mA or 0~20mA

 go to MFC order form

 go to clean and calibrate

 For any particular request please contact:  info@flokal.eu

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