|
 Mass
Flow Controllers / Meters
|
|
SEC-G100
Series (Semi configuration) |
|
Smallest
MFC (39mm square).
Response
Time within 1 sec.
Inside
Volume Reduced by 80%.
Supports
IGS Gas Panel Fittings.
Available
with 1/4" VCR.
|
|
|
SEC-G100
Series (NeSSI configuration) |
|
Smallest
MFC (39mm square).
Supports
NeSSI Surface Mount Sticks.
Designed
for ANSI/ISA 76.00-02 2002 Standard.
Inside
Volume Reduced 80% (compared to standard MFC).
|
|
|
SEC/SEF-4000
Series |
|
Analog
Ultra-Clean (Piezo Control Valve).
Piezo
Valve MFC.
Stainless
Diaphragm - Metal O-ring (M type).
High
Purge MFC / SEC-4400SP.
Wide
Range MFC / SEC-4400SR.
Free
Mounting Orientation MFC / SEC-4400MF. 4500MF
Applicable Gas: C2F6,
C3F8, C4F8,
SF6, SiF8, etc.
|
|
|
SEC/SEF-4001
Series |
|
Most
Reliable Mass Flow Controller.
Fastest
Analog Mass Flow Controller.
Fastest
Analog MFC-Less Than 1 sec. Response Time.
High
Reliability-New Precision Sensor Curcuit.
Optional
"Mount Free" Sensor-Eliminates. Thermal
Syphoning.
|
|
|
SEC-E40
Series |
|
Mass
Flow Controller (Solenoid Control Valve).
General
Purpose.
Auto
Zero Function.
Up
to 500 slm.
|
|
|
SEC-6470-6480
Series |
|
High
Flow Mass Flow Controller.
Capable
to flow from 200 SLM ~ 1000 SLM (N2).
This model is equipped with the combination
of pneumatic metal diaphragm valve and solenoid
actuator valve. The fitting in this model
employs all stainless configuration (M Type).
|
|
|
SEC/SEF-7300
Series |
|
Mass
Flow Controller (Piezo Control Valve).
Reliable,
Accurate Zero Point / New Type Sensor.
Fast
Response / New Type PC Board.
Compact
Size Model / Surface Dimension: 106mm:
1SCCM~30SLM(N2).
|
|
|
SEC/SEF-300/400/500/600
Series |
|
Thermal
Mass Flow Controller.
(Thermal
Control Valve).
Compact
Size / SEC-310 .
High
Accuracy Model / SEC-405.
|
|
|
SEC/SEF-8000/2000
Series |
|
Mass
Flow Controller For High Temperature.
Piezo
Actuator / SEC-8000 series.
Thermal
Actuator / SEC-2000 series.
|
|
|
SEC-7340LD
Series |
|
Low
Differential Pressure MFC.
Specifically
Designed for SDS® Safe Delivery Source.
Applicable
Gases-AsH3, BF3, PH3,
Sif4, GeF4.
|
|
|
SEC-F700
Series |
|
Piezo
Control Valve.
Up
to Five Separate Calibration Curves.
Fast
Response for All Flow Ranges / Digital PID.
Diagnose
MFC Problems by Various Alarm Functions / flow
rate setting, output signal, valve, valve clearance,
sensor, power, temperature of PC board.
IGS
or Standard Fittings.
RS-485,
RS-422.
|
|
|
SEC-V100
Series |
|
Digital/Analog
· Compact · Low Cost ·
Solenoid Valve.
RS-422
Serial Bus Communication.
RJ-11
Daisy Chain.
10
sccm to 50 slm Same Footprint.
IGS
or Standard Fittings.
|
|
|
SEC-Z
Digital Series |
|
First
300mm Standard.
DeviceNet™
Controlled MFC.
Compact
Mass Flow Controller.
Fastest
Response - All Ranges / Piezo Actuator / Latest
Technology Sensor.
Ultra
Clean / 5 Ra Standard / Minimized Welding Points.
Standard
DeviceNet™ Interface / ODVA Certified.
|
|
|
Residual
Gas Analyzer |
|
Micropole™
System
World's
Smallest Complete Mass Spectrometer System.
Low
Cost.
Interchangeable
Components.
High
Pressure Operation.
Easy
to Use.
|
|
|
The
STEC RGA Micropole™ System is the world’s smallest
complete mass spectrometer system. The small
size, low cost, and component interchangeability
provide the user with a set of powerful features
and unique advantages. The mix-and-match feature
is crucial for easy upgrade, troubleshooting,
and replacement. In addition, the ability to
operate at higher pressures (mTorr range) without
sacrificing UHV measurement capabilities translates
into a twofold advantage: measuring gaseous
concentrations directly using an open source
and reducing or eliminating additional vacuum
pumps. Since the vacuum pumping requirements
are less stringent, RGA Micropole™ Systems can
be packaged together with various sample introduction
methods in the form of portable instruments
for field applications.
|
|
Liquid
Flow Controllers / Meters |
|
LF-LV
Series |
|
Most
Reliable Mass Flow Controller.
Unique
Cooling Method.
Ultra
Compact Design.
High
Speed Response.
Small
Flow Range.
Ultra
Clean (LF & LV-MO).
High
Accuracy/Low Pressure Drop.
Applicable
for various types of liquid.
Low
Boiling Point Liquids.
|
|
|
The
LF Series Mass Flow Meters are designed to measure
liquid flow rates from 0.02 to 100 ccm. Its
unique cooling method sensor (patent pending)
developed by STEC is the first of its kind in
the world. The cooling method allows us
to measure ultra low flow rates of liquids with
extreme accuracy and high stability, even in
the case of low boiling point liquids. Any liquid
can contain dissolved gases that can cause cavitation
and bubble generation when passed through a
conventional, heated sensor tube, but with the
STEC cooling element, these problems are eliminated.
The LV series liquid Mass Flow Controller employs
the cooling method sensor and the high performance
STEC, piezo actuated, metal diaphragm control
valve. The field proven piezo valve is
also an excellent component for use with low
boiling point liquids because there is virtually
no heat generation, especially when compared
to solenoid valves. Both the LF and LV are designed
with minimized surface area, straight flow through
(no bypass), and no dead volume for ultra clean
liquid delivery.
|
|
VC
Series |
|
Compact
Liquid Source Vaporization System.
Compact-1/5
the Size of Previous Models.
Fast,
Complete Vaporization.
Installation
Flexibility.
Suitable
for Semiconductor Films Such as LPCVD, MCVD,
TEOS, TMPO, TMOA, TiCl4, etc.
Suitable
for the Next Generation of Semiconductor Materials
Such as Thin Ferroelectric Films, Ba, Ta, Ti,
and more.
|
|
|
LSC
Series |
|
Liquid
Vaporization System.
Stable,
Accurate Control of High Temperature Process
Vapor.
Non-Carrier
Gas Model.
The
Widely Accepted Baking System.
|
|
|
TL
Series |
|
Liquid
Vaporization System.
Stable,
Accurate Control of Process Vapor
High
Flow Vapor is Possible- TEOS1 SLM.
Stable
in Any Orientation.
Carrier
Gas Model.
|
|
|
LK-P |
|
KARMAN'S
VORTEX SYSTEM LIQUID FLOW METER.
All
PFA Construction.
No
Particle Generation / No Moving Parts.
No
Dead Space.
Attitude
Insensitive.
|
|
