CMOsens® PerfomanceLine Mass Flow Controllers for Gases

  The CMOsens PerformanceLine Mass Flow Controller enables very fast and accurate control of gas flows overa very wide range. Its leading performance is based on Sensirion™s unsurpassed CMOsens ® sensor technology which combines a high precision sensor element with the amplification and A/D converter circuit on one single CMOS chip. The digital calibrated and temperature compensated sensor signal is converted directly on the CMOsens chip into a PWM signal which is used in a fast analog controlling circuit to control the valve. This results in very high accuracy, fast settling time and large dynamic range. The CMOsens sensor is packed in a vacuum tight stainless steel package which is mounted on a rugged aluminium housing. This makes the PerformanceLine MFC the best choice for a wide range of applications, such as mass flow controlling for process control, medical applications, fuel cells, as well as gas flow metrology.The PerformanceLine MFC provides analog electrical interfaces for input and output signals (0 - 5 V) and requires a standard supply voltage of  15VDC. It can be operated at input pressures of up to 10 bar (145 psi).

FEATURES

High accuracy Mass Flow Controller (0.8% of set point for 10-100% FS).

CMOsens technology with unbeatable price/performance ratio.

Fast settling time (<0.15 sec to within 2% of Setpoint).

Analog interfaces.

Digitally calibrated & temperature compensated.

Mechanically compatible with other standard Mass Flow Controllers.

NIST traceable calibration.

Standard supply voltage: +/-15VDC.

Attractive cost for OEM applications.

 go to MFC order form

 go to clean and calibrate