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Brooks
Instrument expands the capability and functionality
of their successful Smart Mass Flow Products
to include a metal sealed, UltraHigh Purity
instrument. This new breed of mass flow controller
is available with analog, digital, RS-232, RS-485
or PROFIBUS-DP communication interface protocols.
Brooks Proprietory Adaptive Valve Control makes
these Smart Mass Flow Products virtually insensitive
to process interference. The Adaptive Valve
Control algorithm ensure sunrivalled performance
and fast control, under varying process conditions.
Brooks' commitment to continuous improvement
in safety standards and application flexibility,
has resulted in a product that offers
industry leading performance. Brooks Instrument
continues to excel in performance, features,
reliability, serviceability and quality.
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FEATURES
Compact
design, provides mass flow measurement and control
of gases from 3 sccm to 30 slpm full scale N2
equivalent. High accuracy, repeatability and
immunity to temperature changes delivers improved
process performance. Provided with proprietory
adaptive valve control algorithm to ensure fast
response and stable control of gas flow under
varying process conditions. Long term reliability
and negligible zero drift ensures reliable measurement
and control. Available with PROFIBUS-DP
communication protocol or Analog I/O's. Analog
I/O's or digital communication via RS-232 or
RS-485.
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