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Brooks Instrument Delta
Class thermal mass flow measurement and control
product line offersunparalleled flexibility
and performance. Latest Mf Series combine the
benefits of superior accuracy with Brooks' proprietary
Adaptive Valve Control algorithm. Brooks now
offers DeviceNetTM high-speed (up to 500k baud)
digital communications. Brooks' communications
capabilities and device-profile have been certified
by ODVA (Open DeviceNet Vendors™ Association).
The MFC micro- processor uses a multi-point
calibration curve to deal with residual sensor
non-linearity, yielding a highly accurate process
signal. The microprocessor then executes Brooks™
proprietary Adaptive Valve Control algorithm
to rapidly adjust the valve actuation to match
setpoint. Process data and commands are available
via digital I/O DeviceNetcommunications. Delta
Class Products take advantage of modular design
in both mechanical and electrical construction.
This modularity allows for simplified customer
ordering and factory configuration, enabling
Brooks to more easily meet the ever changing
needs of our global customers. Brooks' production
flexibility translates into reduced lead times
for our customers. The Delta Class Mf Series
greatly improve accuracy. Applications will
see settling time improvements and improved
stability to varying process conditions, due
to Brooks' proprietary Adaptive Valve Control
algorithm.
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FEATURES
Wide
FS flow range for measurement and control of
gases from 3 sccm to 2500 slpm (N2
Equiv.); Accuracy: ±1% of rate (setpoint)
including linearity; industry leading sensor
stability. Long term drift performance of <
0.2% per year. Increased system throughput by
reducing Maintenence and eliminating periodic
recipe adjustment; storage of up to 10 selectable
calibration curves; spares inventories are reduced
by limiting the number of individual MFC/M's
required, lowering inventory holding costs;
NEMA 4X and IP65 compliant for "Hosedown".
Applications such as: Food, Beverage, Pharmaceutical
and biotech.
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