Digital MFCs

    SIC Digital Mass Flow Controller provides:

      Multi-PID control.

      Linearity calibration function.

      Environmental temperature compensation.

      Self-diagnosis.

      On-line zero switch.

      Central Monitor system (CMS).

      Software for monitor & control.

     

       The MFC MC-2000&MC-3000 SERIES has inbuilt CPU, it’s a new age and high performance Gas Flow Controller. MC-2000&MC-3000 SERIES includes the following features:

      Possess excellent functions, and inbuilt Microprocessor.

      Adopt the A/C, D/A with high accuracy, and high dpi.(16 bit)

      Possess 2 kinds of Alarm modes.( Abnormality occurring and state changing)

      Possess 2-color LED indicating state(Alarm).

      Auto zero from origin point. (Inbuilt auto zero switch or exterior I/O input control)

      Possess General Digital Interface (RS232C/RS485 as standards)

      Set up Device Number by RS232C Digital Interface.

      Adopt digital control method (that can improve influence of low flow).

      Convenient and functional controlling commands(ASCH code communication).

      Attach with sensor in surrounding temperature compensation method developed by LINTEC along.(US. PAT. 4984460).

      Attach with piezo actuator.

      Adopt standard metal seal –Au, Pt.

      Possess the characteristic to be compatible and changeable with old analog MFC.

      It possesses multiple gas switching function and can be set up through software to switch MFC for different usage.

    Specifications

    Description

    Mass Flow Controller

    Model’s Name

    MC-2100NO MC-2100NC

    MC-2200NO MC-2200NC

    MC-3100NO MC-3100NC

    MC-3250NO MC-3250NC

    Flow rate (Full Scale)

    SCCM

    12, 20, 50, 100, 200,500

    -------

    SLM

    1, 2, 5

    10, 20

    30

    50

    Valve Operation mode

    NO = Normally Open

    NC = Normally Closed

    Minimum Control Flow

    2% of Full Scale

    Accuracy

    Linearity

    ± 1.0 % F.S.

    ± 0.5 % F.S.

    ± 2.0 % F.S.

    ± 1.0 % F.S.

    Reappearance

    ± 0.2 % F.S.

    Reaction Time

    1 second

    Pressure Difference kg/ cm2

    0.5~3.0

    1.0~3.0

    1.5~3.0

    2.0~3.0

    Maximum Operation pressure

    3.0 kg/cm2

    294kpa

    Pressure Endurance

    10.0 kgf/ cm2 (980kpa)

    Temperature coefficient

    0.02 % F.S./ ℃(For Zero)

    0.02 % F.S./ ℃(For Span)

    Pressure Effects

    0.1 ( % F.S./ (kg-cm) 2)

    Operation Temperature

    NC-2100 0~500C

    Leakage Rate

    ＜ 1 × 10-10 (atm. Cc/ sec) He

    ＜ 1 × 10-11 (Pu. M3/ sec) He

    Material of contacting surface for gas

    SUS 316L, PCTFE

    Seal Material

    (Au)

    Fitting

    1/4” (VCR, SWL, VCO)

    1/4” or 3/8” (VCR, SWL, VCO)

    Flow Output Signals

    Base on flow rate 0~5 V (DC)/ 4~20mA

    Flow Set Signals

    Base on flow rate 1~5 V (DC)/ 4~20mA

    Required Power

    + 15V 100mA, –15V 150mA

 go to MFC order form

 go to clean and calibrate

 For any particular request please contact:  info@flokal.eu

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