µ-FLOW® Mass Flow Meters and Controllers for Liquids

    The µ-FLOW mass flow meter is basically a straight tube of stainless steel 316L without any built-in obstructions,internal diameter approx. 1 mm. In the centre of the tube is the heater/sensor arrangement, based on measuring heat transfer. Flow control is achieved by coupling to the meter a COMBI-FLOW control valve with a purge connection on top of the sleeve, or as an option an on/off valve, so as to eliminate air or gas when starting up the system. The electronic control function forms  part of the normal circuitry in the meter.

FEATURES

    Thru-Flow measurement; orbitally welded;attitude insensitive; cleanroom assembled; negligible dead-volume (option).

Performance specifications

 Accuracy rating: ±2% FS including non-linearity and  (based on actual calibration) repeatability.

 Attitude sensitivity: max. error at 90°C off horizontal 0,2% FS.

Vibration sensitivity: virtually insensitive.

Temperature sensitivity: off zero 0,1% FS/°C, off span 0,1% of reading typical H₂O.

Power supply sensitivity: 10% change in 15 V no effect.

Flow rates (based on H₂O)

min. 0,01...0,25 g/h.        

max. 0,1...2 g/h (Intermediate ranges available).

 go to MFC order form

 go to clean and calibrate