MFC-D07-16 Metal-Sealed Gas Mass Flow Controller with Maximum Operating Pressure: 10MPa

FEATURES

Standard full scale (N₂): 0 to 5/ 10 /20 /30 /50 /100 /200 /300 /500SCCM, 0 to 1/2/3/5/10SLM.

Accuracy: +/-1%FS.

Linearity: +/-0.5 to 1%FS.

Repeatability: +/-0.2%FS.

Pressure drop: 0.1 to 0.5MPa .

Max pressure: 10MPa.

Power supply: +15V, 50mA; -15V, 200mA .

Dimensions:

Swagelok: 127 x 8 x 31mm.

VCR: 124 x 8 x 31mm .

Response: 1 to 4sec (gaseous), 10sec (electric) .

Temperature range: 5 to 15deg C.

Weight: 1.2kg.

 go to MFC order form

 go to clean and calibrate