MFC-D07-11A IS-Approved Mass Flow Controller in Weight of 1.2 kg

FEATURES

Standard full scall (N₂): 0 to 5/10/20/30/50/100/200/300/500SCCM, 0 to 1/2/3/5/10SLM.

Accuracy: +/-2% FS.

Linearity: +/-0.5 to 2% FS.

Repeatability: +/-0.2% FS.

Max. pressure: 10MPa.

Pressure drop: 0.1 to 0.5MPa.

Response: 1 to 4sec (gaseous), 12sec (electronic) .

Connector: 15-pin D.

Power supply: +15V 50mA, -15V 200mA.

Weight: 1.2kg.

Dimensions: 127 x 30 x 136mm (swagelok), 124 x 36 x 136mm (VCR).

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