Features:

DeviceNet (ODVA) digital interface;

High performance (metal seal, piezo valve, high accuracy, multi gas);

+24V single power operation;

Surface mount interface;

Patented ambient temperature compensated flow sensor (U.S. and Japan).

Specifications

Model		MC-5100MO MC-5100MC	MC-5200MO MC-5200MC	MC-5250MO
Range (Full scale) N2 equivalent		5, 10, 20, 30, 50, 100, 200, 300, 500SCCM 1, 2, 3, 5SLM	10, 20SLM	50SLM
Valve operation mode		Normally open valve: MO Normally closed valve: MC		Normally open valve
Surface polishing		LEP
Minimum controllable flow rate		2%F. S.
Accuracy		±(0.25%SP+0.25%F.S.)	±(0.45%SP+0.25%F.S.)	±(0.75%SP+0.25%F.S.)
Linearity		±0.5%F. S.
Repeatability		±0.15%F. S.
Response time		1 second typical
Required differential pressure		49~294kPa	98~294kPa (10SLM) 147~294kPa (20SLM)	98~294kPa (50SLM)
Withstand pressure		980kPa
Temperature coefficient	zero	±0.02%F. S./°C
	span	±0.02%F. S./°C	±0.04%F. S./°C	±0.08%F. S./°C
Operation temperature		0~50°C
Leak integrity		1×10-11Pa·m3 / sec He
Materials exposed by gas		SS-316L, PCTFE, Au (Pt)
Control valve actuator		Piezo electric actuator
Standard fitting		6.35mmVCR compatible
Power supply requirement		11~25VDC (5VA max.)
Digital interface		DeviceNet　(SEMI E54 and ODVA SEMI SIG MFC profile)

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