Features:

High performance 1.125 inch digital MFC.(metal seal, piezo valve, high accuracy and digital controlled);

Compatible to analog MFC;

Software compatible with MC-2000,3000 series;

RS232C and RS485 digital interface (on-board jumper selection);

Surface mounting option available (SEMI STD.).

Specifications:

Model		MC-4102MO MC-4102MC	MC-4202MO MC-4202MC	MC-4252MO
Range (Full scale) N2 equivalent		5, 10, 20, 30, 50, 100, 200, 300, 500SCCM 1, 2, 3, 5SLM	10, 20SLM	50SLM
Valve operation mode		Normally open valve: MO Normally closed valve: MC		Normally open valve
Surface polishing		LEP
Minimum controllable flow rate		2%F. S.
Analog flow rate output		0-5V DC (proportional to flow rate)
Analog flow rate command		0-5V DC (proportional to flow rate)
Accuracy		±0.5%F.S.	±0.75%F.S.	±1%F.S.
Linearity		±0.5%F. S.
Repeatability		±0.2%F. S.
Response time		1 second typical
Required differential pressure		49~294kPa	98~294kPa (10SLM) 147~294kPa (20SLM)	98~294kPa (50SLM)
Withstand pressure		980kPa
Temperature coefficient	zero	±0.02%F. S. /°C
	span	±0.02%F. S. /°C	±0.04%F. S. /°C	±0.08%F. S. /°C
Operation temperature		0~50°C
Leak integrity		1×10-11Pa·m3 / sec He
Materials exposed to gas		SS-316L, PCTFE, Au (Pt)
Control valve actuator		Piezo electric actuator
Standard fittings		6.35mmVCR compatible
Power supply requirements		+15V: 120mA, -15V: 100mA
Digital interfaces		RS232C, RS485

 go to MFC order form

 go to clean and calibrate