Liquid Vapor Controller LVC 414

   This Liquid Vapor Controller is designed to measure and control the mass flow rate of doping materials by varying the flow of carrier gas through a bubbler containing the source material.

FEATURES

True vapor mass flow in bubbler systems.

Defeats influence of liquid level, temperature and pressure.

Liquid level surveillance possible.

Mounting position insensitive.

Good surface finish for ultra cleanoperation.

Various gas fitting configurations.

Heating temperature of bubbler much lower compared with direct vaporization.

Thermal control valve design gives: reliability, no hysteresis, smooth,fine control, a normally open flow path for gas line purging when power is off.

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