|

|
IntelliFlow II is an advanced digital mass flow controller,
expanding the attributes of the first generation
IntelliFlow product line. Key enhancements for
IntelliFlow II include: user configurability;
extension of flow range to 100 slpm (N2
equivalent); advanced electronic, mechanical
and software designs.
|
|
FEATURES
User configurability allows customers to program generic MFCs to
virtually any gas and range within select boundaries.
In addition to superior performance, user configurability
delivers significant cost savings through: inventory
reduction; reconfiguration efficiency (reduced
time, complexity and cost); tool uptime improvements; product
lead-time compression.
|