High Perfomance Metal Seal High Flow Mass Flow Controllers

   The Brooks ® Model 5965 Mass Flow Controller offers state of the art performance in high flow gas measure-ment and control. It combines the outstanding leak integrity of metal seals, ultraclean internal surface finish (7 Ra) for particulate- free delivery and enhanced response for rapid process applications. A leader in its class, the Brooks Model 5900 Series MFC's redefine Ultra Clean Performance by providing molecular contamination levels which are less than half the industry standard. The superior design also allows for very rapid gas changeover. All of this makes the Model 5965 the best solution for even the most challenging application.

FEATURES

  Electropolished wetted surfaces (optional); enhanced process (7 Ra) internal surface finish normally closed valve (normally open valve optional); particulate free; high purity VAR 316L Stainless Steel; high flow capability (100 slpm N2 , 200 slpm H2 ); fast response to command changes; helium leak check ports; class 100 assembly and calibration; high leak integrity (less than 10-11 atm-cc/sec He); negligible flow overshoot/undershoot; insensitive to mounting attitude; TTL compatible "valve off" function; electrically activated valve override; low command flow cutoff; available with all popular process connections.

 go to MFC order form

 go to clean and calibrate