High Perfomance Metal Sealed Mass Flow Controllers

      The Brooks^® Model 5964 Metal Sealed Mass Flow Controller offers state of the art performance in gas flow measurement and control. It combines the outstanding leak integrity of metal seals, ultraclean internal surface finish (5 Ra) for particulate-free delivery and enhanced response for rapid process applications. A leader in its class, the Brooks Model 5900 Series MFC's redefine Ultra Clean Performance by providing molecular contamination levels which are less than half the industry standard. The superior design also allows for very rapid gas changeover.

FEATURES

  Electropolished wetted surfaces (optional); enhanced process (5 Ra) internal finish; all metal seals; particulate free; high purity VAR 316L stainless steel; enhanced response to command changes; helium leak check ports; class 100 assembly and calibration; high leak integrity (less than 10-11  atm-cc/sec He); normally Closed Valve (Normally Open Valve optional); wide flow range (0.06 sccm through 30,000 sccm N₂); insensitive to mounting attitude; electrically activated valve override; low command flow cutoff; TTL compatible "valve off" and purge function connections; available with all popular process; downport C-Seal (optional).

 go to MFC order form

 go to clean and calibrate