E-Series Mass Flow Controllers (Models 5850E, 5850EM)

Mass Flow Controllers Model 5850E

    The Brooks ® Model 5850E Mass Flow Controller accurately measures and controls gas flows. The heart of the system is the removable flow sensor which produces an electrical output signal linear with flow rate used for indicating, recording, and/or control purposes. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

FEATURES

   Easy Maintenance; fast flow response to command changes; negligible flow overshoot/ undershoot;removable sensor; insensitive to mounting attitude; wide flow range (up to 30 slpm N₂ ); end accessible zero and span potentiometers; jumper selectable soft start; electrically activated valve override; jumper selectable external valve control; low command flow cutoff; normally closed valve (normally open valve optional); mechanically and electrically compatible with other mass flow controllers; corrosion resistant valve.

Mass Flow Controllers Model 5850EM

   The Brooks ® Model 5850EM Metal Sealed Mass Flow Controller has all the features of the standard Model 5850E plus all metal seals for outstanding leak integrity and cleanliness. The Model 5850EM eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable mass flow. The heart of the system is the highly stable sensor which produces an electrical output signal linear with flow rate.

FEATURES

High leak integrity (less than 10^-10   atm-cc/sec He); enhanced process (10 Ra) internal finish (optional); electropolished wetted surfaces (optional); exclusive vented-polished internal threads; normally Closed Valve (Normally Open Valve optional); wide flow range (0.06 sccm through 30,000 sccm N₂); insensitive to mounting attitude; full penetration welded fittings;mechanically and electrically compatible with other mass flow controllers; electrically activated valve override; low command flow cutoff; TTL compatible "valve off" and purge function; 0(4)-20 mA I/O, 24 Vdc, i-series design (optional); available with all popular process connections; downport C-Seal (optional).

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