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Brooks
Instrument Delta Class elastomer seal thermal
mass flow measurement and control product line
offers unparalleled flexibility and performance.
Latest EL Series combine the benefits of superior
accuracy with Brooks' proprietary Adaptive Valve
Control algorithm. The MFC/M's microprocessor
uses a multi-point calibration curve, to deal
with residual sensor non-linearity, yielding
a highly accurate process signal. The microprocessor
then executes Brooks' proprietary Adaptive Valve
Control algorithm to rapidly adjust the valve
actuation to match setpoint. Process data and
commands are available as traditional 0-5 volt
analog I/O or digital DeviceNet communications.
Measurement and control performance are the
same! Delta Class Products take advantage of
modular design in both mechanical and electrical
construction. The Delta Class EL Series controllers
and meters can directly replace existing analog
Products providing greatly improved accuracy.
Analog and digital applications will see settling
time improvements and improved stability to
varying process conditions, due to Brooks' proprietary
Adaptive Valve Control algorithm.
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FEATURES
Wide
FS flow range for measurement and control of
gases from 3 sccm to 2500 slpm (N2 Equiv.).
Accuracy: ±1% of rate (setpoint), 1200-2500
slpm, 1% FS including linearity. Industry leading
sensor stability. Long term drift performance
of < 0.2% per year. Increased system throughput
by reducing Maintenance and eliminating periodic
recipe adjustment. Storage of up to 10 selectable
calibration curves. Spares inventories are reduced
by limiting the number of individual MFC/M's
required, lowering inventory holding Costs.
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