Delta Class Gass Mass Flow Meters and Controllers (EM Series)

      Brooks Instrument's Delta Class EM Series metal sealed thermal mass flow measurement and control product line offers unparalleled flexibility and performance. Latest EM-family combines the benefits of the superior accuracy of the TruCal TM process gas calibration system with the rapid settling time achieved with Brooks' proprietary Adaptive Valve Control algorithm.

EM Series Models SL6850/51 to SL6860/61

All-Metal seals, High leak integrity (less than 1x10^-10 atm-cc/sec He); industry leading sensor stability; long term drift performance of < 0.2% per year. Increasing tool throughput by reducing Maintenence and eliminating periodic recipe adjustment;accuracy: ±1% of rate or (setpoint) including linearity; MTBF of approx. 500,000 hours - Drives preventive Maintenance cost down and increases through-put reducing the cost of ownership; digital software can store 10 selectable calibration and flow ranges. Spares inventories are reduced by limiting the number of individual MFCs required, lowering inventory holding costs.

UHP Series Models SL6950/51 to SL6960/61

All wetted surfaces are electro-polished to 5 Ra to Maintain particle,moisture and contamination free process conditions; all-Metal seals, high leak integrity (less than 1x10^-10 atm-cc/sec He); industry leading sensor stability; long term drift performance of < 0.2% per year. Increasing tool throughput by reducing  Maintenence and eliminating periodic recipe adjustment; truCal TM (option) process gas calibration available for a variety of gases. TruCal reduces measurement errors that result from the property differences between process gases and surrogate calibration gases, resulting in superior accuracy and performance!

UHP Series Models SL6910 & SL6920 & EM Series  Models SL6850/51 to SL6860/61

Digital software can store 10 selectable calibration and pressure ranges. Spares inventories are reduced by  limiting the number of individual PCs required, lowering inventory holding costs. Accuracy: ±0.5% F.S., including linearity and hysteresis to assure that the Pressure MTBF of approx. 100,000 hours - Drives preventive  Maintenance cost down and increases through-put, reducing the long term cost of ownership. Available with VCR TM , CS or C-seal Downport connections- simplifying integration into existing and/or developing tools and systems in the semiconductor industry. All-Metal seals, High leak integrity (less than 10^-10 atm- cc/sec He). Eliminates droop, hysteresis, and boost.

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