Analog and digital Mass Flow controllers and Metrers

   Celerity Mass Flow Controllers precisely monitor and control the mass flow of gases in processes such as Plasma Etching, CVD, Diffusion, EPI, and Sputtering where superior accuracy is required. Mass Flow Meters do not control, but accurately measure and report the mass flow that is passing through.

FEATURES

Attitude. Each MFC is built for a specific attitude either HOS - horizontal or sideways and HOV- horizontal or vertical. Calibration Conditions. The MFC is calibrated under downstream vacuum conditions. MFCs ordered as "atmosphere" are calibrated with the MFC's outlet exhausting to atmosphere.

Standard Temperature and Pressure. 0°C and 760 mm Hg. Calibration Traceability. National Institute of Standards and Technology (N.I.S.T.).

Manufacturing Environment. Assembled, Calibrated, Tested and Packaged in Class 100 Cleanroom Environment. Purge Capability. Full purge capability with 1 slm purge minimum.

Auto Shutoff Option. With the Auto Shutoff option a setpoint command of less than 2% (0.1 Vdc) closes the MFC control valve. Since an MFC valve is not a positive shutoff valve, a shutoff valve in series with the MFC may be needed.

Response Time Options. Fast: <=1 Sec to a setpoint command of 20%-100% (per SEMI E17-91)

Valve Options. Normally-closed (standard), normally-open (option).

Flow Direction Options. "Standard": sensor upstream and valve downstream "Pressure buffered": Valve upstream and sensor downstream.

Auto Zero Option. The Auto Zero feature detects zero offset during no-flow conditions and electronically re-zeros the output signal. Auto Zero can be of great benefit in reducing drift and increasing equipment uptime. However, its proper application depends entirely on the ability to ensure absolutely no flow across the MFC sensor during the Auto Zero cycle. With few exceptions, this means that there must be positive shutoff valves immediately upstream and downstream of the MFC, and that there must be proper valve sequencing.

Fittings Options. Swagelok^® , VCR^® , VCO^® , B, C, W and surface-mount as well as Ultraseal, Buttweld and Specials.Not all fittings are available for all gases and ranges. Fitting options will vary according to the MFC.

DataCal Computer-Controlled Mass Flow Calibration System

   Сomputer based DataCal system allows Operators to easily and accurately calibrate and test Mass Flow Meters/Controllers and Pressure Controllers. This information is stored in database management files so that the user can retrieve the stored information for future use. This can be to look at the calibration history of an MFC, all MFCs, or, select certainm information for input to a statistical analysis software package. All the functions of the DataCal are controlled by the DataCal software which is factory installed and tested in the computer prior to shipment.

FEATURES

Easy to learn without a computer background.

One Calibration, Verification, Test, Database Management system does it all.

Assures the most accurate calibration at setpoints, and between setpoints.

The calibration screen shows when a MFC needs to be adjusted, how much, and which direction to turn the adjustment tool.

Keeps a running history of every unit for review and analysis.

An easy way to "quick check" calibration.

Every unit is calibrated per your test specifications, for consistent results.

Conversion factors assures that units are accurately calibrated with a surrogate gas or the actual gas that is used.

You specify the test procedure wanted, DataCal will test to those procedures, the same way, every time.

Reduce spare parts inventory.

Makes in-house Maintenance and repair easier.

High definition color monitors makes visual analysis easier.

Databases capable of output to other software programs for further reporting and analysis.

Worldwide product support.

On-Site Calibration gives faster turn-around time.

 go to MFC order form

 go to clean and calibrate