Digital Mass Flow Controller AFC 80 MD & Meter AFM 85 MD

   Are dedicated to systems using reactive gas from 10sccm to 30slm. All metal seals, ultra clean finish and no particle generation.

FEATURES

The highest performances combined on the Qualiflow AFC 80 MD and AFM 85 MD with:

Regular winding flow sensor 316L "totalseals " metals seals and electropolished ultra clean surface finish.

Full potential of digital technology.

Accuracy:

During calibration,a polynomial curve (fourth degree)calculated from 6 points gives an accuracy of 1% of setpoint if setpoint >20% of F.S., 0.2% of F.S. if setpoint <20% of F.S.

Less inventory:

Up to 10 calibration curves of different gases can be stored into the memory, easily changeable by user.To keep the benefit of accuracy,the maximum factor between the full scales is 3.

Optimized numerical control:

The control of gas flow is done by a numerical algorithm assuming a control without overshoot at any setpoint and improving the response time. Each calibration curve is stored with its own regulation parameters.

Communication modes:

Analog mode: the MFC is 100% compatible with analog series, with the advantage to communicate via serial RS232C for Maintenance, calibration.

RS485 option :permits to control up to 32 MFC 's under MODBUS protocol (RJ11 connector).

DeviceNet or PROFIBUS high speed fieldbus.

go to MFC order form

 go to clean and calibrate