Home\Products\Semiconductor industry\MFC's & accessories\Brooks Instruments\E-Series Elastomer or Metal Seal Remote Transducer Pressure Controller/FlowMeter (Model 5866 RT)

E-Series Elastomer or Metal Seal Remote Transducer Pressure Controller/FlowMeter (Model 5866 RT)
	The Brooks® Model 5866RT Pressure Controller/Flow-meter controls pressure while also measuring flow rate. The Model 5866RT receives a remote pressure transducer signal, and using adjustable integral PID control electronics and control valve, will Maintain a desired set pressure. In addition to the pressure control function, the Model 5866RT provides a 0-5 V signal which is linear with mass flow rate. The Model 5866RT can also be configured as a mass flow controller for calibration or test purposes.
FEATURES High accuracy. Electropolished wetted surfaces (optional). Dynamic tuning adjustments with top mounted DIP switches. High leak integrity. Pressure control and flow measurement. Compact design. Wide flow measurement range. Electrically activated valve override.

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