i-Series High Flow Industrial Mass Flow Controller&Meter (Models 5853i/5863i)

   The Brooks^® Models 5853i and 5863i industrial mass controller and meter accurately measure and control high gas flow. The heart of the system is its removable, attitude- insensitive sensor which produces an electrical output signal linear with flow rate used for indicating, recording, and/or control purposes. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

FEATURES

Easy Maintenance.

Negligible flow overshoot/undershoot.

Removable sensor.

Insensitive to mounting attitude.

Wide flow range (up to 1000 slpm N₂).

End accessible zero and span potentiometers.

Dual analog signal outputs 0-5 Vdc and 4-20 mA or 0-20 mA.

Wide power supply tolerance, 15-28 Vdc.

Subminiature D-connector electric for RFI immunity.

Meriam^® LFE restrictor.

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