E-Series Mass Flow Controllers&Meters (Models 5853E, 5863E)

    The Brooks ® Models 5853E/5863E Mass Flow Controller and Meter accurately measure and control gas flow (5863E Meter only). The heart of the system is its removable, attitude- insensitive sensor which produces an electrical output signal linear with flow rate used for indicating, recording, and/or control purposes. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

FEATURES

Easy Maintenance. Fast flow response to command changes. Negligible flow overshoot/undershoot. Removable sensor. Insensitive to mounting attitude. Wide flow range (up to 1000 slpm N₂). End accessible zero and span potentiometers.

Model 5853E:

Jumper selectable external valve control. Electrically activated valve override. Low command flow cutoff. Normally closed valve. Meriam^® LFE restrictor. Bellows sealed high stability valve. Wide range of pressures and pressure drops.

go to MFC order form

 go to clean and calibrate