E-Series Metal Seal High Flow Mass Flow Controller (Model 5851EM)

     The Brooks ® Model 5851EM Metal Seal Mass Flow Controller offers state of the art performance in high flow gas measurement and control. It combines the outstanding leak integrity of metal seals with a variety of options which allow maximum application flexibility. The heart of the Model 5851EM is the highly stable sensor which provides an electrical output signal linear with flow rate. This signal is used for indicating, recording and/or control purposes without the need for an auto-zero circuit.

FEATURES

High leak integrity (less than 10^-11 atm-cc/sec He); electropolished wetted surfaces (optional);enhanced process (5 Ra) internal surface finish (optional); normally closed valve (normally open valve optional); particulate free; high purity VAR 316L Stainless Steel; high flow capability 100 slpm N₂ (200 slpm H₂); fast response to command changes; helium leak check ports; class 100 assembly and calibration; negligible flow overshoot/undershoot; insensitive to mounting attitude; TTL compatible "valve off" function; electrically activated valve override; low command flow cutoff; available with all popular process connections; 0(4)-20mA I/O, 24 Vdc power supply (optional).

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