E-Series High Flow Mass Flow Controllers (Model 5851E)

    The Brooks^® Model 5851E Mass Flow Controller accurately measures and controls gas flow. The heart of the system is the removable flow sensor which produces an electrical output signal linear with flow rate used for indicating, recording, and/or control purposes. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

FEATURES

improved response for low command changes.

Easy Maintenance.

Negligible flow overshoot/undershoot.

Removable sensor.

Insensitive to mounting attitude.

Wide flow range (up to 100 slpm N₂ , 200 slpm H₂).

End accessible zero and span potentiometers.

Jumper selectable soft start.

Electrically activated valve override.

Jumper selectable soft start.

Low command flow cutoff.

Normally closed valve (Normally open valve optional).

Corrosion resistant valve.

go to MFC order form

 go to clean and calibrate