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FEATURES
The
highest performances of the digital P.C.B. combined
with elastomeric seals on the Qualiflow AFC
50 D and AFM 55 D: full potential of digital
technology; low pressure drop option for TEOS
SDC,TiCl4 etc …; 100% compatible with analog
AFC50 by using the D 15 pin adapter (P/N Q2001733-09
or Q2001733-10)
Accuracy:
During
calibration,a polynomial curve (fourth degree)calculated
from 6 points gives an accuracy of 1% of setpoint
if setpoint >20% of F.S., 0.2%of F.S.if
setpoint <20% of F.S.
Less
inventory:
Up
to 10 calibration curves of different gases
can be stored into the memory, easily changeable
by user.To keep the benefit of accuracy,the
maximum factor between the full scales
is 3.
Optimized
numerical control:
The
control of gas flow is done by a numerical algorithm
assuming a control without overshoot at
any setpoint and improving the response time.Each
calibration curve is stored with its own
regulation parameters.
Communication
modes:
Analog
mode :the MFC is 100% compatible with analog
series,with the advantage to communicate
via serial RS232C for Maintenance,calibration
RS485 option: permits to control up to 32
MFC 's under MODBUS protocol (RJ12 connector).
Devicenet
or PROFIBUS high speed fieldbus.
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