Mass Flow controller AFC 50 & Meter AFM 55

 Are suitable for flow rates from 10sccm to 30slm, featuring a unique reliable horizontal electromagnetic valve.

FEATURES

  The traditional analog Qualiflow AFC 50 and AFM 55 with elastomeric seals and magnetic valve:

Unique fast and reliable horizontal magnetic valve.

Low pressure drop option for TEOS SDC, TiCl₄ etc … Using large sensor diameter, gives very low pressure drop and defeats contamination and clogging.

Perfect flow splitting through special bypass design,gives optimal linearity and accuracy.

Good surface finish for ultra clean operation.

Normally open and normally closed versions available with color identification (green for NO,red for NC).

Gasketed endplates; no threading.

Purge command.

go to MFC order form

 go to clean and calibrate