Tylan® VC4900/VC4900M Vapor Controllers

     Mykrolis's Tylan VC4900 and Tylan VC4900M vapor controllers are designed specifically to meet the exacting requirements of today's semiconductor and industrial processes. The Tylan VC4900 vapor enable the delivery of organometallics such as tetraethoxsilane (TEOS), trimethylphosphate (TMP) and trimethylborate (TMB) with pressure drops as low as 6.7 kPa (50 Torr).

FEATURES

Incorporates a large diameter sensor tube, an enlarged valve orifice, and a high stroke valve to maximize the conductance of the plumbing. Enables high flow at lower pressure drops than a standard MFC. Optional remote electronics and heater. Allows high temperature calibration. Prevents calibration shifts due to a change in ambient temperature. Balanced power load Low lead current eliminates signal differing from its controlling device. Autozero circuitry Automatically resets to zero under no flow conditions, and shifts the entire calibration curve to cancel many effects of temperature coefficients and calibration drift.

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