Digital Mass Flow Controller AFC310 MD

  Built to answer the most demanding 300mm applications: Piezo-electric valve, conical bypass and all metal design.

FEATURES

 AFC310 MD is the very high standard MFC featuring: the new generation piezoelectric valve; all metal technology and electropolished ultra clean surface finish; the full potential of digital technology; multidimensional software temperature compensation.

Piezoelectric valve:

The New Generation Piezoelectric Valve MFC's springless metal design drastically reduces particle creation within the gas line. The piezoelectric valve offers extremely low dead volume, providing superior performance, great stability,minimal gas replacement and response time,particle prevention and zero corrosion.

 All-Metal Design:

 Combined with the new generation piezoelectric valve,the metal seals within the MFC and the all-metal conical bypass contribute to ultra clean performances.

Digital advantages:

Less inventory :up to 10 calibration curves of different gases can be stored into the memory, easily changeable by user.

Optimized numerical control.

Analog, RS232, RS485, Modbus, Devicenet or Profibus communication modes capabilities.

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 go to clean and calibrate