Tylan® FC2979M/FM3979M Mass Flow Controllers and Flowmeters

  Mykrolis's Tylan FC2979M is designed to meet the rigorous demands of ultra-clean weldless gas delivery systems required in today's most advanced semiconductor processes.

FEATURES

Elastomer-free, all-metal flow path. Eliminates a major source of outgassing and minimizing the corrosive effects common with many semiconductor process gases. High purge capability with low flow control. Enhanced ability to expel contaminants from the gas delivery system. Reduces clean-up and installation times. Class 100 environment assembly Assurance that product is ultra-clean. Balanced power load Low lead current eliminates signal differing from its controlling device. Autozero circuitry Automatically resets to zero under no flow conditions, and shifts the entire calibration curve to cancel many effects of temperature coefficients and calibration drift.

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