Tylan® FC2900 and FM3900 Mass Flow Control and Flowmeters

    Premium quality metal-sealed mass flow controller for use with toxic gases in semiconductor applications.

FEATURES

Designed specifically to meet the exacting requirements of today's semiconductor processes and equipment, the Tylan FC2900M mass flow controller and Tylan FM3900M flowmeter are premium quality and are metal sealed. The Tylan FC2900M MFC combines proven components and techniques with fresh concepts in mechanical design. This metal-sealed mass flow controller provides significant reduction in gas system particulate levels in semiconductor processing equipment. It's ultra-high leak integrity adds an extra measure of safety when used with toxic gases. The metal seal is compatible with all reactive gases. Oxygen and water vapor from the atmosphere diffuse through elastomers, leading to process problems with reactive gases. Our metal seal technology, which uses soft nickel seals, eliminates this permeation problem. The seal design makes it easy to disassemble and repair.

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