MFC-D07-50 Intelligent Gas Mass Flow Controller with High-Speed Reaction

FEATURES

Standard full scales (N2): 5/10 /20 /30 /50 /100 /200 /300 /500sccm, 1 /2 /3 /5 /10SLM.

Accuracy: +/-1%.

Linearity: +/-0.5% .

Repeatability: +/-0.2%FS.

Pressure drop: 0.1 to 0.5MPa (max).

Max pressure: 10MPa.

Response: 1 to 2sec.

Power supply: +15V , 50mA; -15V, 200mA.

Dimensions: 127 x 38 x 136mm (swagelok).

Weight: 1.2kg.

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