MFC-D07-18 Accurate Gas Mass Flow Controller with Maximum Pressure of 3MPa

FEATURES

Standard full scale (N₂): 0 to 5/ 10 /20 /30 /50 /100 /200 /300 /500SCCM, 0 to 1/ 2 /3 /5 /10SLM.

Accuracy: +/-1%FS.

Linearity: +/-0.5 to 1%FS.

Repeatability: +/-0.2%FS.

Pressure drop: 0.1 to 0.5MPa (max).

Max pressure: 3MPa.

Response: 1 to 4sec.

Power supply: +15V, 50mA, -15V, 200mA.

Dimensions: 127 x 26 x115mm (swagelok).

124 x 26 x 115mm (VCR).

Weight: 0.85kg.

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