MFC-D07-15 High-Stability Gas Mass Flow Controller with Maximum Pressure of 3MPa

FEATURES

Standard full scale (N₂): 10/ 20/ 30/ 50/ 100/ 200/ 300/ 500SCCM, 1/ 2/ 3 /5 /10SLM.

Accuracy: +/-1%FS.

Linearity: +/-0.5%FS.

Repeatability: +/-0.2%FS.

Max pressure: 1MPa.

Response: 1 to 4sec.

Dressure drop: 0.05 to 0.3MPa.

Power supply: +15V, 50mA, -15V, 200mA.

Connector: 20-pin card edge.

Weight: 0.85kg.

Dimensions: 127 x 6 x 15mm.

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