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Thermogard™ NE Filters |

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Thermogard NE disposable and cartridge
filters provide increased structural stability for high temperature and
high-viscosity conditions while using the same proprietary non-wetting and
prewet PTFE membrane technology as Mykrolis’s QuickChange® filters. This
technology offers quick startup, optimum filtration efficiency and flow, and
simple and fast installation, resulting in a low total cost of
ownership. |
QuickChange® 1000, 1500, 3000
Disposable Filters |

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QuickChange Disposable filters, designed for use in
any aqueous-based chemical, are shipped water-wet and require no IPA prewetting
procedures. Without an IPA prewetting requirement, QuickChange Disposable
filters prevent alcohol/chemical interaction, avoid potential sources of
contamination, and eliminate the cost and inconvenience of hazardous waste
disposal. QuickChange Disposable filters reduce filter changeout time, minimize
system downtime, and lower cost-of-ownership. |
QuickChange® AT and ATX Cartridge
Filters |

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QuickChange AT and ATX Cartridge filters, designed for
use in any aqueous-based chemical are shipped water-wet, and require no IPA
prewetting procedures. Without an IPA prewetting requirement, QuickChange AT and
ATX filters prevent alcohol/chemical interaction, avoid potential sources of
contamination, and eliminate the cost and inconvenience of hazardous waste
disposal. QuickChange AT and ATX filters reduce filter changeout time, minimize
system downtime, and lower cost-of-ownership. |
QuickChange® ATX Disposable
Filters |

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QuickChange ATX Disposable filters, designed for use
in any aqueous-based chemical, are shipped water-wet and require no IPA
prewetting procedures. Without an IPA prewetting requirement, QuickChange
Disposable filters prevent alcohol/chemical interaction, avoid potential sources
of contamination, and eliminate the cost and inconvenience of hazardous waste
disposal. QuickChange Disposable filters reduce filter changeout time, minimize
system downtime, and lower cost-of-ownership. |
QuickChange® PF-40 and PF-80
Cartridge and Disposable Filters |

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QuickChange PF Cartridge and Disposable filters,
designed for use in any aqueous-based chemical are shipped water-wet, and
require no IPA prewetting procedures. Without an IPA prewetting requirement,
QuickChange PF filters prevent alcohol/chemical interaction, avoid potential
sources of contamination, and eliminate the cost and inconvenience of hazardous
waste disposal. QuickChange PF filters reduce filter change-out time, minimize
system downtime, and lower cost-ofownership. |
Pumpgard II Filters |

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Pumpgard II filters protect chemical pumps and final
filters against damage from broken silicon wafer pieces. Pumpgard II filters
have a 60 µm retention rating, which is ideal to capture larger wafer pieces
before they reach the pump and/or final filter. Within the normal operation of a
wet bench, process wafers can break and release wafer shards into the process
bath. These shards can cause damage to the bellows (made of Teflon®
fluoropolymer resin) or to diaphragms within the pump. Pumpgard II filters, installed on the upstream side of the
recirculation pump, can remove shards from process chemical baths before damage
to expensive chemical pumps occurs. |
pHasor® II Membrane
Contactor |

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PFA hollow fiber technology delivers a
high concentration of bubble-free dissolved gas in high purity chemicals or
water. The pHasor II Membrane Contactor uses a unique gas permeable membrane
with very high water intrusion pressure, which permits gas to rapidly dissolve
into a liquid stream, while preventing liquid water from permeating across the
membrane. |
Panelgard™ PDP Cartridge
Filters |

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The Panelgard PDP Cartridge Filter is a final
point-of-use surface type cartridge filter using unwoven polypropylene material.
With high retention efficiency, high flow rate, and long product life, it
contributes to better cost performance. |
Chem-Line™ II PF-40 and PF-80 Filter
with Flaretek® Fittings |

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Chem-Line II PF-40 and PF-80 filters are designed for
the most demanding point-of-use filtration of process chemicals. Chem-Line
filters are recommended for use with most acids, bases, and non-flammable
solvents at both ambient or elevated temperatures. Their O-ringless design
prevents bypass and eliminates compatibility issues often associated with O-ring
materials. Chem-Line II PF filters have been engineered for safe and convenient
in-line installation to minimize the risks associated with the handling of
corrosive chemicals. Incorporating the Wafergard® unique stacked-disc
technology, filter elements do not flex or shed particles. The entire filter is
constructed of Teflon® PTFE and PFA 440HP and provides superior downstream
cleanliness with broad chemical compatibility. |
Wafergard PF Cartridge
Filters |

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Description
- Fully constructed of Teflon.
- Stacked-disc design provides maximum retention and downstream
cleanliness.
Applications
- Designed for the most demanding and critical point-of-use chemical
filtration at ambient and high temperatures.
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Microgard UPE & UPX Cartridge
Filters |

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Microgard UPE/UPX filters use a patented ultra-high
molecular weight polyethylene (UPE) membrane, which has the highest retention
efficiency of any membrane: > 99.999% of the rated pore size. This
revolutionary membrane has excellent retention capabilities to meet the
increasing demands of today.s leading edge technology. Microgard UPE/UPX filters
offer low surfactant binding, excellent wettability and superior downstream
cleanliness. |
Microgard PI Cartridge
Filters |

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Microgard PI filters use a patented ultra-high
molecular weight polyethylene (UPE) membrane, which has the highest retention
efficiency of any membrane: > 99.999% of the rated pore size. This
revolutionary membrane has excellent retention capabilities to meet the
increasing demands of today.s leading edge technology. Microgard PI filters
offer low surfactant binding, excellent wettability and superior downstream
cleanliness. |
Microgard™ Plus Cartridge
Filters |

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Microgard Plus filters use a patented ultra-high
molecular weight polyethylene (UPE) membrane, which has the highest retention
efficiency of any membrane: up to 99.999% at retention rating particle size.
This revolutionary membrane has excellent retention capabilities to meet the
increasing demands of today’s leading edge technology. Microgard Plus filters
offer low surfactant binding, excellent wettability and superior downstream
cleanliness. |
Intercept® HP & HPX Cartridge
Filters |

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Intercept filters utilize a patented
hydrophilic membrane which activates multiple particle capturing mechanisms. The
Intercept membrane minimizes the electrostatic repulsion between the membrane
surface and particles allowing for retention of particles smaller than the pore
size of the filter. |
GuardianTM AT and ATX Cartridge Filters |

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Constructed with a high-quality, high-retention PTFE
membrane, Guardian AT and ATX filters provide the best retention efficiency and
the lowest particle counts in chemical delivery systems. Guardian AT and ATX
filters are ideal for single pass and spray tool filtration applications and
bulk chemical delivery. |
Guardian™ ATX Disposable
Filters |

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The combination of a high-efficiency PTFE membrane and
a large filtration-area device allows Guardian ATX disposable filters to deliver
low particle counts without compromising flow rates, even with high-viscosity
fluids such as sulfuric and phosphoric acids. Recommended applications for
Guardian ATX disposable filters include filtration of sulfuric acid, nitric
acid, acetic acid, phosphoric acid, hydrochloric acid, hydrogen peroxide,
organic strippers, and various nonflammable solvents. The Guardian ATX
disposable filter is ideal for single pass and spray tool filtration
applications and bulk chemical delivery. |
GuardianTM DEV Cartridge Filters |

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Guardian DEV filters provide cost-effective
performance for KOH and TMAH based developer solutions and other high pH
chemical filtration applications. The Guardian DEV arrive read-to-use for maximum system
up-time. The patented hydrophilic membrane (UPE) requires no prewetting and no
flushing for operation in aqueous solutions. The membrane does not dewet in
aqueous solutions. The cartridges deliver quick flush up time and excellent
flow/retention characteristics. |
Guardian™ DEV Disposable
Filters |

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Guardian DEV Disposable filters provide cost-effective
performance for KOH and TMAH based developer solutions and other high pH
chemical filtration applications. The Guardian DEV arrive read-to-use for maximum system
up-time. The patented hydrophilic membrane (UPE) requires no prewetting and no
flushing for operation in aqueous solutions. The membrane does not dewet in
aqueous solutions. The cartridges deliver quick flush up time and excellent
flow/retention characteristics. |
Guardian™ HP and HPX Cartridge
Filters |

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Guardian HP and HPX cartridge filters provide the best
retention efficiency and the lowest particle counts in chemical delivery systems
that provide fluids critical to semiconductor cleaning and wet etching,
including HF, BOE, NH4F, Copper Plating Solution, and Super-Q etch. The Guardian HP and HPX cartridges arrive read-to-use
for maximum system up-time. The patented hydrophilic membrane (UPE) requires no
prewetting for operation in aqueous solutions, no flushing, and does not dewet
in aqueous solutions. The cartridges deliver quick flush up time and excellent
flow/retention characteristics. |
Guardian™ HPX
Disposable Filters |

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Guardian HPX disposable filters provide the best
retention efficiency and the lowest particle counts in chemical delivery systems
that provide fluids critical to semi-conductor cleaning and wet etching.
Guardian HPX disposable filters are recommended for use in HF, BOE, NH4F, and
Super-Q etch chemical delivery systems. The Guardian HPX disposable’s large
surface area provides high particle retention without sacrificing
flow. |
Fluorogard® FP and FP-HP Cartridge
Filters |

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Fluorogard FP and FP-HP filters, manufactured with
Teflon® fluoropolymer PTFE pleated membranes with polypropylene supports,
provide unmatched durability and cleanliness for filtration of process fluids
used in the semiconductor industry. |
Fluorogard® AT and ATX Cartridge
Filters |

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Fluorogard AT and ATX cartridge filters are fully
constructed of fluoropolymer materials and are designed to efficiently remove
particles from a broad range of acids, bases, solvents and other microelectronic
process chemicals. These cartridges are recommended for medium to high flow
applications. ATX cartridges are also ideal for high viscosity filtration
applications. |
Fluorogard® AT and ATX Disposable
Filters |

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Fluorogard AT and ATX disposable filters use PTFE and
PFA materials with excellent chemical compatibility and thermal stress
resistance. Fluorogard AT and ATX disposable filters eliminate
handling of the filter element and decrease the possibility of contamination,
making these filters ideal for critical applications that require highest purity
liquids. Fluorogard AT and ATX disposable filters feature a compact and
easy-to-handle housing shell, which reduces potential exposure to hazardous
chemicals during installation and disposal. Leak-free connections allow easy,
quick and safe filter changeout. |
Fluorogard® Plus Cartridge
Filters |

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Fluorogard Plus filters, manufactured with hydrophobic
Teflon® fluoropolymer PTFE pleated membranes with polypropylene supports,
provide unmatched durability and cleanliness for filtration of process fluids
used in the semiconductor industry. The filters are desiged to withstand 100 psi
differential pressure at 25° C in the forward direction and 75 psi differential
pressure at 25° C in the reverse direction. |
Fluorogard® RS Cartridge and
Disposable Filters |

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Fluorogard RS filters and pre-filters deliver ultimate
protection from films, gels, and hard particle contamination by providing high
capacity removal of contaminants from photoresist stripping and residue removal
chemistries. Specifically designed for long-life filtration of photoresist
stripping chemistries at elevated temperatures. |
Fluorogard® TPX and TPX-HP Cartridge
Filters |

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As film display glass substrates get increasingly
larger, filtration efficiency is critical to ensure that high quality chemical
reach point-of-use without compromising production time. Fluorogard TPX and
TPX-HP filters are designed for high flow filtration applications. The PTFE
membrane provides strong chemical resistance. The unique hydrophilic membrane
has been through a surface modification to eliminate the need for alcohol
wetting thereby reducing organic extractables. |
Etchgard™ HP and HPX Cartridge
Filters |

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Etchgard HP and HPX Cartridge Filters achieve the
highest rates of quality and efficiency, improving Overall Equipment Efficiency
(OEE) rates.Bath particle counts directly impact the device
particle counts. In a recirculation bath, a high turnover rate ensures rapid
particle removal. Mykrolis manufactures Etchgard HP and HPX Cartridge Filters
with a patented high-efficiency, high-flow membrane that delivers improved bath
quality. The large filtration area and high flow rates result in more passes
through the filter and optimal bath turnover. |
Etchgard™ HPX Disposable
Filters |

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Filter installation, start-up and flushing times are
markedly decreased when using the Etchgard HPX disposable filter. The patented
hydrophilic UPE membrane eliminates the need for prewetting and the large
filtration area of the HPX disposable filter enhances membrane retention and
flow. Low differential pressure delivers high flow rates and decreases
microbubble generation. High membrane surface area also means longer time
between filter change-outs, greatly increasing system up-time. |