Wet Etch & Clean and Chemical Suppliers

Thermogard™ NE Filters

    Thermogard NE disposable and cartridge filters provide increased structural stability for high temperature and high-viscosity conditions while using the same proprietary non-wetting and prewet PTFE membrane technology as Mykrolis’s QuickChange® filters. This technology offers quick startup, optimum filtration efficiency and flow, and simple and fast installation, resulting in a low total cost of ownership.

QuickChange® 1000, 1500, 3000 Disposable Filters

  QuickChange Disposable filters, designed for use in any aqueous-based chemical, are shipped water-wet and require no IPA prewetting procedures. Without an IPA prewetting requirement, QuickChange Disposable filters prevent alcohol/chemical interaction, avoid potential sources of contamination, and eliminate the cost and inconvenience of hazardous waste disposal. QuickChange Disposable filters reduce filter changeout time, minimize system downtime, and lower cost-of-ownership.

QuickChange® AT and ATX Cartridge Filters

  QuickChange AT and ATX Cartridge filters, designed for use in any aqueous-based chemical are shipped water-wet, and require no IPA prewetting procedures. Without an IPA prewetting requirement, QuickChange AT and ATX filters prevent alcohol/chemical interaction, avoid potential sources of contamination, and eliminate the cost and inconvenience of hazardous waste disposal. QuickChange AT and ATX filters reduce filter changeout time, minimize system downtime, and lower cost-of-ownership.

QuickChange® ATX Disposable Filters

     QuickChange ATX Disposable filters, designed for use in any aqueous-based chemical, are shipped water-wet and require no IPA prewetting procedures. Without an IPA prewetting requirement, QuickChange Disposable filters prevent alcohol/chemical interaction, avoid potential sources of contamination, and eliminate the cost and inconvenience of hazardous waste disposal. QuickChange Disposable filters reduce filter changeout time, minimize system downtime, and lower cost-of-ownership.

QuickChange® PF-40 and PF-80 Cartridge and Disposable Filters

    QuickChange PF Cartridge and Disposable filters, designed for use in any aqueous-based chemical are shipped water-wet, and require no IPA prewetting procedures. Without an IPA prewetting requirement, QuickChange PF filters prevent alcohol/chemical interaction, avoid potential sources of contamination, and eliminate the cost and inconvenience of hazardous waste disposal. QuickChange PF filters reduce filter change-out time, minimize system downtime, and lower cost-ofownership.

Pumpgard II Filters

    Pumpgard II filters protect chemical pumps and final filters against damage from broken silicon wafer pieces. Pumpgard II filters have a 60 µm retention rating, which is ideal to capture larger wafer pieces before they reach the pump and/or final filter. Within the normal operation of a wet bench, process wafers can break and release wafer shards into the process bath. These shards can cause damage to the bellows (made of Teflon® fluoropolymer resin) or to diaphragms within the pump. Pumpgard II filters, installed on the upstream side of the recirculation pump, can remove shards from process chemical baths before damage to expensive chemical pumps occurs.

pHasor® II Membrane Contactor

    PFA hollow fiber technology delivers a high concentration of bubble-free dissolved gas in high purity chemicals or water. The pHasor II Membrane Contactor uses a unique gas permeable membrane with very high water intrusion pressure, which permits gas to rapidly dissolve into a liquid stream, while preventing liquid water from permeating across the membrane.

Panelgard™ PDP Cartridge Filters

   The Panelgard PDP Cartridge Filter is a final point-of-use surface type cartridge filter using unwoven polypropylene material. With high retention efficiency, high flow rate, and long product life, it contributes to better cost performance.

Chem-Line™ II PF-40 and PF-80 Filter with Flaretek® Fittings

   Chem-Line II PF-40 and PF-80 filters are designed for the most demanding point-of-use filtration of process chemicals. Chem-Line filters are recommended for use with most acids, bases, and non-flammable solvents at both ambient or elevated temperatures. Their O-ringless design prevents bypass and eliminates compatibility issues often associated with O-ring materials. Chem-Line II PF filters have been engineered for safe and convenient in-line installation to minimize the risks associated with the handling of corrosive chemicals. Incorporating the Wafergard® unique stacked-disc technology, filter elements do not flex or shed particles. The entire filter is constructed of Teflon® PTFE and PFA 440HP and provides superior downstream cleanliness with broad chemical compatibility.

Wafergard PF Cartridge Filters

Description

  • Fully constructed of Teflon.
  • Stacked-disc design provides maximum retention and downstream cleanliness.

Applications

  • Designed for the most demanding and critical point-of-use chemical filtration at ambient and high temperatures.

Microgard UPE & UPX Cartridge Filters

    Microgard UPE/UPX filters use a patented ultra-high molecular weight polyethylene (UPE) membrane, which has the highest retention efficiency of any membrane: > 99.999% of the rated pore size. This revolutionary membrane has excellent retention capabilities to meet the increasing demands of today.s leading edge technology. Microgard UPE/UPX filters offer low surfactant binding, excellent wettability and superior downstream cleanliness.

Microgard PI Cartridge Filters

   Microgard PI filters use a patented ultra-high molecular weight polyethylene (UPE) membrane, which has the highest retention efficiency of any membrane: > 99.999% of the rated pore size. This revolutionary membrane has excellent retention capabilities to meet the increasing demands of today.s leading edge technology. Microgard PI filters offer low surfactant binding, excellent wettability and superior downstream cleanliness.

Microgard™ Plus Cartridge Filters

   Microgard Plus filters use a patented ultra-high molecular weight polyethylene (UPE) membrane, which has the highest retention efficiency of any membrane: up to 99.999% at retention rating particle size. This revolutionary membrane has excellent retention capabilities to meet the increasing demands of today’s leading edge technology. Microgard Plus filters offer low surfactant binding, excellent wettability and superior downstream cleanliness.

Intercept® HP & HPX Cartridge Filters

   Intercept filters utilize a patented hydrophilic membrane which activates multiple particle capturing mechanisms. The Intercept membrane minimizes the electrostatic repulsion between the membrane surface and particles allowing for retention of particles smaller than the pore size of the filter.

GuardianTM AT and ATX Cartridge Filters

     Constructed with a high-quality, high-retention PTFE membrane, Guardian AT and ATX filters provide the best retention efficiency and the lowest particle counts in chemical delivery systems. Guardian AT and ATX filters are ideal for single pass and spray tool filtration applications and bulk chemical delivery.

Guardian™ ATX Disposable Filters

    The combination of a high-efficiency PTFE membrane and a large filtration-area device allows Guardian ATX disposable filters to deliver low particle counts without compromising flow rates, even with high-viscosity fluids such as sulfuric and phosphoric acids. Recommended applications for Guardian ATX disposable filters include filtration of sulfuric acid, nitric acid, acetic acid, phosphoric acid, hydrochloric acid, hydrogen peroxide, organic strippers, and various nonflammable solvents. The Guardian ATX disposable filter is ideal for single pass and spray tool filtration applications and bulk chemical delivery.

GuardianTM DEV Cartridge Filters

    Guardian DEV filters provide cost-effective performance for KOH and TMAH based developer solutions and other high pH chemical filtration applications. The Guardian DEV arrive read-to-use for maximum system up-time. The patented hydrophilic membrane (UPE) requires no prewetting and no flushing for operation in aqueous solutions. The membrane does not dewet in aqueous solutions. The cartridges deliver quick flush up time and excellent flow/retention characteristics.

Guardian™ DEV Disposable Filters

    Guardian DEV Disposable filters provide cost-effective performance for KOH and TMAH based developer solutions and other high pH chemical filtration applications. The Guardian DEV arrive read-to-use for maximum system up-time. The patented hydrophilic membrane (UPE) requires no prewetting and no flushing for operation in aqueous solutions. The membrane does not dewet in aqueous solutions. The cartridges deliver quick flush up time and excellent flow/retention characteristics.

Guardian™ HP and HPX Cartridge Filters

   Guardian HP and HPX cartridge filters provide the best retention efficiency and the lowest particle counts in chemical delivery systems that provide fluids critical to semiconductor cleaning and wet etching, including HF, BOE, NH4F, Copper Plating Solution, and Super-Q etch. The Guardian HP and HPX cartridges arrive read-to-use for maximum system up-time. The patented hydrophilic membrane (UPE) requires no prewetting for operation in aqueous solutions, no flushing, and does not dewet in aqueous solutions. The cartridges deliver quick flush up time and excellent flow/retention characteristics.

Guardian HPX Disposable Filters

   Guardian HPX disposable filters provide the best retention efficiency and the lowest particle counts in chemical delivery systems that provide fluids critical to semi-conductor cleaning and wet etching. Guardian HPX disposable filters are recommended for use in HF, BOE, NH4F, and Super-Q etch chemical delivery systems. The Guardian HPX disposable’s large surface area provides high particle retention without sacrificing flow.

Fluorogard® FP and FP-HP Cartridge Filters

   Fluorogard FP and FP-HP filters, manufactured with Teflon® fluoropolymer PTFE pleated membranes with polypropylene supports, provide unmatched durability and cleanliness for filtration of process fluids used in the semiconductor industry.

Fluorogard® AT and ATX Cartridge Filters

    Fluorogard AT and ATX cartridge filters are fully constructed of fluoropolymer materials and are designed to efficiently remove particles from a broad range of acids, bases, solvents and other microelectronic process chemicals. These cartridges are recommended for medium to high flow applications. ATX cartridges are also ideal for high viscosity filtration applications.

Fluorogard® AT and ATX Disposable Filters

   Fluorogard AT and ATX disposable filters use PTFE and PFA materials with excellent chemical compatibility and thermal stress resistance. Fluorogard AT and ATX disposable filters eliminate handling of the filter element and decrease the possibility of contamination, making these filters ideal for critical applications that require highest purity liquids. Fluorogard AT and ATX disposable filters feature a compact and easy-to-handle housing shell, which reduces potential exposure to hazardous chemicals during installation and disposal. Leak-free connections allow easy, quick and safe filter changeout.

Fluorogard® Plus Cartridge Filters

    Fluorogard Plus filters, manufactured with hydrophobic Teflon® fluoropolymer PTFE pleated membranes with polypropylene supports, provide unmatched durability and cleanliness for filtration of process fluids used in the semiconductor industry. The filters are desiged to withstand 100 psi differential pressure at 25° C in the forward direction and 75 psi differential pressure at 25° C in the reverse direction.

Fluorogard® RS Cartridge and Disposable Filters

    Fluorogard RS filters and pre-filters deliver ultimate protection from films, gels, and hard particle contamination by providing high capacity removal of contaminants from photoresist stripping and residue removal chemistries. Specifically designed for long-life filtration of photoresist stripping chemistries at elevated temperatures.

Fluorogard® TPX and TPX-HP Cartridge Filters

    As film display glass substrates get increasingly larger, filtration efficiency is critical to ensure that high quality chemical reach point-of-use without compromising production time. Fluorogard TPX and TPX-HP filters are designed for high flow filtration applications. The PTFE membrane provides strong chemical resistance. The unique hydrophilic membrane has been through a surface modification to eliminate the need for alcohol wetting thereby reducing organic extractables.

Etchgard™ HP and HPX Cartridge Filters

    Etchgard HP and HPX Cartridge Filters achieve the highest rates of quality and efficiency, improving Overall Equipment Efficiency (OEE) rates.Bath particle counts directly impact the device particle counts. In a recirculation bath, a high turnover rate ensures rapid particle removal. Mykrolis manufactures Etchgard HP and HPX Cartridge Filters with a patented high-efficiency, high-flow membrane that delivers improved bath quality. The large filtration area and high flow rates result in more passes through the filter and optimal bath turnover.

Etchgard™ HPX Disposable Filters

    Filter installation, start-up and flushing times are markedly decreased when using the Etchgard HPX disposable filter. The patented hydrophilic UPE membrane eliminates the need for prewetting and the large filtration area of the HPX disposable filter enhances membrane retention and flow. Low differential pressure delivers high flow rates and decreases microbubble generation. High membrane surface area also means longer time between filter change-outs, greatly increasing system up-time.

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