In integrated, modular gas systems, the path is formed through standard stainless
steel-machined blocks that bolt together. Active components such as valves and
regulators are connected to the gas path by mounting onto the blocks. Modular
technology preserves the ability to make any gas system configuration inherent
to conventional welded systems for process tool gas systems and facility-wide
gas distribution systems.
Modular gas systems allow for easy configuration, component
standardization, and 50% reduced footprint compared to conventional gas
systems. These advantages, in turn, lead to a number of additional customer
benefits such as increased up-time due to enhanced serviceability, reduced
inventory requirements, and improved cycle time.
We offer two standard designs of modular substrate blocks:
K1S – a 1.125" block design
NextGen gas delivery module