- Presenting
- the
improved Flokal MFC
-
- Mass
Flow Controller F
260
|
|
Features
- The
improved version of the MFC 260
- with
elastomeric seals, reliable thermal valve and a new sensor:
-
Compatible
with other MFC-
Economic
design, simple construction
-
Outstanding
records throughout various industries
-
Possibility to regulate with external readout.
|
|
|
|
Ratings
|
Flow Range F260
(equivalent N2):
|
from
20 sccm to 5 slm
|
|
Control Range:
|
between
2 and 100% F.S.
|
|
Valve Type:
|
Thermal
|
|
Valve Rest Position:
|
Normally
Open only
|
|
Accuracy:
|
+/-
1% of F.S.
|
|
Linearity:
|
+/-
0.5% of F.S
|
|
Repeatability:
|
+/-
0.3% of F.S.
|
|
Step
Response Time:
|
<=
6 sec. typical (SEMI E17-91)
|
|
Temperature
Range:
|
between
5 and 40°C
|
|
Temperature
Coefficient:
|
<
0.1% F.S. /°C
|
|
Maximum
Inlet Pressure:
|
10
bar
|
|
Minimum
Differential Pressure:
|
0.5
bar (0.7 bar with H2)
|
|
Maximum
Differential Pressure:
|
3
bar
|
|
Pressure
Coefficient:
|
<
0.1% F.S./bar
|
|
Wetted
Materials:
|
316
L Stainless steel
|
|
Leak Rate:
|
<
2.10-9 scc/sec (He)
|
|
Seals:
|
standard
Viton, option Neoprene or kalrez
|
|
Fittings:
|
¼
VCR – ¼ VCO – ¼ Swagelok
|
|
|
Power
Input Requirement
- Mass Flow Controller:
+/- 15 VDC, 150 mA
- Mass Flow Meter:
+/- 15 VDC, 25 mA
- Set Point Signal: from 0 to 5 VDC
- Flow Output Signal:
from 0 to 5 VDC
- Electrical Connector:
Card Edge
Options
- Separated electronics
- External readout
- Other on request
|
