Presenting 
the improved Flokal MFC
 
Mass Flow Controller F 260

Features

The improved version of the MFC 260
with elastomeric seals, reliable thermal valve and a new sensor:
 
Compatible with other MFC
Economic design, simple construction
Outstanding records throughout various industries
Possibility to regulate with external readout.

Ratings

Flow Range F260 (equivalent N2): 

from 20 sccm to 5 slm

Control Range:

between 2 and 100% F.S.

Valve Type:

Thermal

Valve Rest Position:

Normally Open only

Accuracy:

+/- 1% of F.S.

Linearity: 

+/- 0.5% of F.S

Repeatability: 

+/- 0.3% of F.S.

Step Response Time: 

<= 6 sec. typical (SEMI E17-91)

Temperature Range:  

between 5 and 40C

Temperature Coefficient: 

 < 0.1% F.S. /C

Maximum Inlet Pressure: 

10 bar

Minimum Differential Pressure: 

0.5 bar (0.7 bar with H2)

Maximum Differential Pressure:  

3 bar

Pressure Coefficient: 

< 0.1% F.S./bar

Wetted Materials: 

316 L Stainless steel

Leak Rate: 

< 2.10-9 scc/sec (He)

Seals: 

standard Viton, option Neoprene or kalrez

Fittings: 

VCR VCO Swagelok

Power Input Requirement

Mass Flow Controller:  +/- 15 VDC, 150 mA
Mass Flow Meter:  +/- 15 VDC, 25 mA
Set Point Signal:  from 0 to 5 VDC
Flow Output Signal:  from 0 to 5 VDC
Electrical Connector:  Card Edge

 Options

Separated electronics
External readout       
Other on request      

download the MFC Flyer

go to MFC order form

go to clean and calibrate

Copyright Flokal 2014