Features:

The MC-3000E series is divided into the MC-3100E and MC-3200E according to differences in full scale ranges. They respectively have normally open or normally closed valve actuators.

Specifications:

Model	Dsub9pin	MC-3102E-NO MC-3102E-NC	MC-3202E-NO MC-3202E-NC
Range (Full scale) N2 equivalent		10, 20, 30, 50, 100, 200, 300, 500SCCM 1, 2, 3, 5SLM	10, 20SLM
Valve operation mode		Normally open valve NO Normally closed valve NC
Surface polishing		Optional
Minimum controllable flow rate		2%F. S.
Analog flow rate output		0-5V DC (Proportional to flow rate)
Analog flow rate command		0-5V DC (Proportional to flow rate)
Accuracy		±1%F. S.
Linearity		±0.5%F. S.
Repeatability		±0.2%F. S.
Response time		1sec (typical)
Required differential pressure		49~294kPa	98~294kPa(10SLM) 147~294kPa(20SLM)
Withstand pressure		980kPa
Temperature coefficient	Zero	±0.02%F. S. /°C
	Span	±0.02%F. S. /°C
Operation temperature		15-50°C
Leak integrity		1×10-11Pa·m3 / sec He
Materials exposed to gas		Stainless steel 316L, PCTFE, Au
Control valve actuator		Piezo electric actuator
Standard fittings		6.35mmVCR compatible
Power supply requirements		+15V:120mA -15V:100mA
Digital interface		RS232C, RS485
Alarm output		Open collector transistor output

   The MM-3100E, 3200E is a new highly functional mass flow meter, which has retained the diverse functions the MC-3000 series possesses. Used in combination with mass flow controllers considerable improvements in reliability can be made.

Features:

High functionality due to built in microprocessor;

High accuracy due to use of high resolution (16 bit) A/D, D/A converter;

Equipped with alarm output function as standard;

Equipped with alarm state LED display;

Equipped with auto zero function;

Equipped with general purpose digital interface (RS-232C or RS-485 conformity);

Device numbers can be set;

Electrical compatibility with previous models preserved;

Compact body size;

Use of metal seals (Standard: Au, Optional: Pt);

Precision polishing of body interior as standard;

Applications:

Connect in series with MFCs which require high reliability to monitor for flow rate abnormalities;

Flow rate measurements of corrosive gases;

Leak tester;

Flow monitor for combustible gases;

Standard flow rate instrument;

Flow rate measurements of various kinds of gases;

Specifications

Model		MM-3102E	MM-3202E
Flow rate range		5SCCM~5SLM	10, 20SLM
Response time (0 to 98%F.S.)		1sec (typical)
Accuracy		±1%F. S.
Linearity		±0.5%F. S.
Repeatability		±0.2%F. S.
Withstand pressure		980kPa
Operation temperature		0~50°C
Temperature coefficient	Zero point	±0.02%F. S./°C
	Span	±0.02%F. S./°C
Pressure coefficient		0.001%F. S./kPa
Leak integrity		1x10-11Pa·m3 / sec
Materials exposed to gases	Body	SUS-316L
	Seals	Au
Standard fittings		6.35mm VCR Male
Flow rate output signal		0~5V (proportional to flow rate)
Set output signal		0~5V (proportional to flow rate)
Alarm output		Open collector transistor output
Digital interface		RS-232C or RS-485 conformity
Power supply requirements		+15V 70mA, -15V 70mA
Mounting direction		Free

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