Liquid Mass Flow Meter LM-2100A

Features:

The LM-2100A liquid mass flow meter measures various liquid material flow rates with high precision.

LINTEC’s patented original thermal mass flow sensor is incorporated for measuring flow rate. Digital circuitry provides high-speed reliable flow rate measurement.

Combined with the flow rate control valve CV series, high precision liquid flow rate control is possible.

In addition, combination with LINTEC’s original vaporizer VU series makes high precision and high speed vaporization possible.

Applications:

Measurement of various liquids such as chemicals, organic solvents, liquid organic compounds or de-ionized water etc.

Flow rate control of various liquids when used in combination with flow rate control valve CV series.

Flow rate control and vaporization when used in combination with vaporizers.

Specifications:

Item	Units	Specifications
Flow rate range (Full scale) Ethanol equivalent	g/min	0.05, 0.1, 0.2, 0.5, 1.0 2.0, 5.0, 10
Accuracy	%F. S.	±1
Linearity	%F. S.	±0.5
Repeatability	%F. S.	±0.2
Pressure capacity	kPa	1000
Operation temperature	°C	15-35
Temperature coefficient	%F. S. /°C	Zero 0.1 Span 0.1
Leak integrity	Pa·m3/sec	1x10-11
Materials exposed to fluids	Body Seals Flow sensor	SUS-316L Au SUS-316L
Standard fittings	Inlet Outlet	3.2mm VCR Male 3.2mm VCR Male
Flow rate command	Volts DC	0-5
Flow rate output	Volts DC	0-5
Power supply requirements		+15V, 100mA -15V, 200mA
Alarm display	Normal Condition change Abnormal	Green LED flash Red LED flash Red LED continuous on
Zero adjustment		Zero switch or auxiliary input
Digital communication	Digital interface Alarm output Zero adj. Input Preset input	RS-232C Open collector output Available Available
Connector and cable	Main connector Communication Cable (Optional)	D05 8 pin CC-DOSF (D-SUB 9 pin) CC-T2 (D-SUB 25 pin)
Mounting direction		Free
Weight	g	800
Optional	LEP CP PT	Surface polishing Anti-corrosive plating Pt Seal

Liquid Mass Flow Controller LC-2100

    Liquid mass flow controller LC-2100 controls various liquid material flow rates with high precision. LINTEC’s original thermal mass flow sensor (Patent Pending) is incorporated for measuring flow rate. Digital electronic circuit provides high speed and highly reliable flow control.

Features:

LINTEC’s original ambient temperature compensation type liquid flow sensor (Patent Pending) is incorporated to provide a high precision flow rate control (±2% of FS);

Bypassless type flow meter is incorporated to reduce inherent error or influence of inclination and to provide a high precision instrument;

Digital electronic circuits are incorporated to improve the features including alarm or communication with external apparatus;

High reliability, normally closed type solenoid actuator is incorporated into the flow control valve to provide high security;

High chemical resistance and leak free with gold (Au) seals.

Applications:

Measuring and controlling of various liquid such as chemicals, organic solvents, organic compound liquids or deionized water etc.

Specifications:

High Performance Vaporizer aporizer Units VU-410, VU-510

VU-410

VU-510

Features:

  The vaporizers can control and vaporize various liquids efficiently by combination with the liquid mass flow meter LM-2100.

   According to the kind of liquid and process condition, the best one can be selected among the various type of vaporizers.

   Vaporizers for LP Process: VU-108; VU-110; VU-301; VU-410; VU-510.

   Vaporizer for AP Process: VU-201

CVD Materials and LINTEC Vaporization Technology

Categories	Applications	Thin Films	Materials	Liquid Mass Flow Meter	Vaporizers
Dielectrics	Passivation, Capacitors	SiO2	TEOS	LM-2100	VU-108 VU-110 VU-301
		Si3N4	TEOS
		BPSG	TEOS, TEB, TEPO
High-k Films	Capacitors	Ta2O5	Ta(OC2H5)5	LM-2100	VU-301 VU-410 VU-510
High-k Films (Ferroelectrics)	Capacitors	BST	Ba(DPM)2	LM-2100	VU-510
			Ba(METHD)2
			Sr(DPM)2
			Sr(METHD)2
			Ti(O-iPr)2(DPM)2
			Ti(O-tBu)2(DPM)2
		PZT	Pb(DPM)2	LM-2100	VU-510
			Zr(O-tBu)4
			Ti(O-iPr)2(DPM)2
		SBT	Sr[Ta(OEt)6]2	LM-2100	VU-510
			Bi(CH3)3
Metal Films	Interconnect Metals	Cu	Cu(hfac)tmvs	LM-2100	VU-410 VU-510
			Cu-ATMS
	Electrodes	Ru	Ru(EtCp)2	LM-2100	VU-410 VU-510
			Ru(OD)3
	Barrier Metals	TiN	TiCl4, TDMAT, TDEAT	LM-2100	VU-301 VU-410 VU-510
		TaN	Ta(Et2N)4, Ta(Me2N)5
Low-k Films	Inter-layer Dielectrics	Various	Various	LM-2100	VU-108 VU-301 VU-110 VU-410 VU-510

VU410 Specifications

VU510 Specifications

Item			Specifications
Valve	Control valve for precursor	CV-P	Diaphragm, Solenoid, Normally closed
	Control valve for solvent	CV-S	Diaphragm, Solenoid, Normally closed
	Shut-off valve	AV	Diaphragm, Pneumatic, Normally closed
Heater	Outer block	HR-1	120V, 100W, 4 units, Total 400W
	Inner block	HR-2	120V, 100W, 2 units, Total 200W
Thermocouple	Outer block	TC1	Type K (CA)
	Inner block	TC2	Type K (CA)
Thermostat	Selectable by temperature	High temperature	Open at 350°C
		Medium temperature	Open at 200°C
Operating temperature	With PID controller		Room temperature to 300°C
Fittings	Valve unit	AV inlet	6.35mm VCR male
		CV-P inlet	3.2mm VCR female
		CV-S inlet	3.2mm VCR female
		AV drive gas inlet	3.2mm OD quick tube connector Air or N2, Pressure;440-690kPaG
	Inner block	Vapor outlet	12.7mm VCR female
Materials exposed to gases/liquids	Vaporizer unit		SS316L, Au
	Valve unit		SS316L, Au, Polyimide
Dimensions	Outer case		H275mm, W160mm, D143mm
Mounting direction			Vertical at vapor outlet down
Environmental temperature			25°C±15°C
Outer case temperature			Less than 80°C with 300°C at vaporizer unit
Weight			8 kg
Accessories	Interconnecting cable	LM2100A to VU-510	3m, 2 pieces (for CV-P and CV-S)
	Connector	JAE SRCN6A-16-7S	1 piece (for heaters and thermostat)
	Connector	RKC CMP01-K	2 pieces (for thermocouple)

Applications

Precursor	Precursor Vapor Pressure torr(@ temp)	Vaporizer Temp. (°C)	Carrier Gas Flow (SCCM)	Flow Rate g/min
Cocktail Ba(thd)2PMDETA&Sr(thd)2PMDETA	0.1(240)	290	N2 200	0.514
Sr(DPM)2	2(300)	280~300	N2 100~300	0.300
Ti(O-C3H7)2(thd)2	220(250)	250	N2 200	0.977
Ti(O-ipu)2(DPM)2	4(250)	250	Ar 200	1.000
Ti(O-tBu)2(DPM)2	4(250)	250	Ar 200	1.000
Ru(EtCp)2	9.6(150)	150	N2 200	0.910
Ru(EtCp)2	9.6(150)	150	N2 200	0.238
Ru(EtCp)2	3.5(130)	130	Ar 200	3.570
Ru(OD)3	1.0(200)	200	N2 100	0.050
Ta(OC2H5)5	2.5(170)	170	N2 200	0.200

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