and repair of your delicate hardware.
In various frontend processes (Diffusion/LPCVD/APCVD/PECVD/MOCVD and
epitaxial), hardware endures quite a bit
in the inherent harsh, abrasive, and corrosive
environments. In many cases invaluable mechanical
components are replaced without the consent
of refurbishing. Nowadays in a demanding
economical environment one can not afford
the luxury to replace costly components
infinitely. Flokal, with a history very
much rooted in the frontend semiconductor
production industry is very much aware and
offers guidence for a cost effective solution
to your maintenance programs.